December 6–8, 2006
Makuhari Messe, Chiba, Japan
Visit us at our Japanese partner Marubeni Solutions Corp. in
Hall 5, booth 5C 605
Hall 5, booth 5C 605
We present the award-winning Reticle Management Software (RSM). Our products cover the entire reticle and carrier life cycle from mask ordering, CofC validation, incoming qualification, storage including reticle stocker automation, reticle inspection, tracking of movements, status changes, waiver, requal, repell, repair, etc.
Our Advanced Inspection Managament provides for triggering and monitoring of reticle inspections based on a very flexible counter and timer mechanism. Dynamic cycles per reticle or reticle group can be configured, e. g. to reflect the decreasing inspection cycles after reticle cleaning/repair when counting the exposure dose to monitor crystal growth and haze. Automatic inspection download and analysis of all reticle inspection results (KLA Starlight/TeraScan, ASML IRIS, CANON PPC, NIKON PPD, Dr. Schenk Pollux, etc.) minimize human errors and insure that your business rules are strictly met.
Our Mask Vendor Connectivity (MaVen) provides for monitoring of the entire reticle order process, automatic status and ETA updates from the mask house, automatic read-in and plausibility/validation checks of data prep information, reticle order files (e. g. SEMI P10) and CofC files. Automatic emails to configurable groups of engineers can be sent based on the validation result or other business rules. Corrective actions can be taken before the reticle is manufactured or shipped, resulting in tremendous savings in both cost and time.
Our software provides an open interface to integrate seamlessly with any MES and MCS system as well as photo dispatch and scheduler applications. It has been in use since 1999 in many advanced fabs around the world.
We will present our latest developments including our material management extensions (MMX) for reticle and reticle carrier management, reticle inspection management, etc.
